Wear mode control of drive tip of ultrasonic motor for precision positioning
Wear mode control of drive tip of ultrasonic motor for precision positioning
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DOI：
10.1016/s0043-1648(03)00371-5
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发表时间：
2004
期刊：
影响因子：
5
通讯作者：
Takeshi Yamaguchi;K. Adachi;Y. Ishimine;K. Katô
中科院分区：
文献类型：
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作者：
Takeshi Yamaguchi;K. Adachi;Y. Ishimine;K. Katô
研制了一种用于电子束直写系统的由al2o3驱动尖端和al2o3驱动导轨驱动的超声电机（USM）精密定位台。由于工作台是由接触界面产生的摩擦力驱动的，因此传动尖端的磨损应保持在轻度磨损模式，以保持传动尖端与从动导轨之间接触界面的最小滑移，从而实现稳定的精密定位。实验提出了超声电机最优预紧力和PID控制器最优增益的选择方法，以使驱动尖端的磨损模式保持在轻度磨损模式。在开环控制中，给定最大级速度时，给出了最优预紧力ww。在预紧力大于0的情况下，驱动端与从动轨之间的宏观滑移得到了抑制。当驱动端头与从动轨道接触界面滑差监测参数Ef的工作电压波动量最小时，给出了PID控制器的最佳增益。通过实验验证了PID控制器的最佳预紧力和增益的选择能够使超声电机驱动端al2o3保持在轻度磨损状态。
A precision positioning stage driven by ultrasonic motor (USM) with Al2O3drive tip and Al2O3driven rail has been developed for the electron beam (EB) direct-write system. Wear of a drive tip should be kept in mild wear mode for a stable precision positioning by retaining the minimum slip in the contact interface between a drive tip and a driven rail since the stage is driven by friction force generated in the contact interface. In this investigation, selecting method of the optimum preload of USM and the optimum gains of PID controller are proposed experimentally in order to keep wear mode of drive tip in mild wear mode. The optimum preload Wcis given in the condition when the maximum stage velocity is given in open loop control. In the condition of preload above Wcmacroscopic slip between drive tip and driven rail is restrained. The optimum gains of PID controller are given when the amount of fluctuation of operating voltage Ef, which is the monitoring parameter of slip in the contact interface between drive tip and driven rail, is the minimum value. Selecting these optimum preload and gains of PID controller is verified to keep wear mode of Al2O3drive tip of USM in mild wear mode experimentally.