SILICON RIBBON CABLES FOR CHRONICALLY IMPLANTABLE MICROELECTRODE ARRAYS
SILICON RIBBON CABLES FOR CHRONICALLY IMPLANTABLE MICROELECTRODE ARRAYS
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DOI：
10.1109/10.284959
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发表时间：
1994-04-01
影响因子：
4.6
通讯作者：
ANDERSON, DJ
中科院分区：
文献类型：
--
作者：
HETKE, JF;LUND, JL;ANDERSON, DJ
本文描述了用于微机械硅微探头的微型超柔性带状电缆的设计、制造和测试，该探头能够在中枢神经系统(CNS)中进行慢性记录和/或刺激。这些互连对于通过经皮连接器将这些微电极可靠地连接到外部世界至关重要。硅电缆允许实现多引线、多股屏蔽的本地互连，这些连接非常灵活，但足够坚固，可以承受正常的处理和外科操作。制造的电缆厚5微米，长1-5厘米，宽60-250微米，最多有8根引线。多晶硅的串联引线电阻通常为4k欧加/厘米，钽的引线电阻通常为500欧加/厘米，并联电容值为5-10 pF/cm，引线间电容低于10 fF/cm。在电气和机械应力下进行的缓冲盐水浸泡测试已经进行了三年多，显示出亚皮安级泄漏水平。内置带状电缆的硅微探头在豚鼠中枢神经系统中保持工作长达一年，记录驱动的单位活动，并将阻抗水平维持在1-7M欧米加范围内。
This paper describes the design, fabrication, and testing of miniature ultraflexible ribbon cables for use with micromachined silicon microprobes capable of chronic recording and/or stimulation in the central nervous system (CNS). These interconnects are of critical importance in reliably linking these microelectrodes to the external world through a percutaneous connector. The silicon cables allow the realization of multilead, multistrand shielded local interconnects that are extremely flexible and yet strong enough to withstand normal handling and surgical manipulation. Cables 5 mu m thick, 1-5 cm long, and from 60 to 250 mu m wide have been fabricated with up to eight leads. The series lead resistance is typically 4 k Omega/cm for polysilicon and 500 Omega/cm for tantalum, with shunt capacitance values of 5-10 pF/cm and an interlead capacitance below 10 fF/cm. Soak tests in buffered saline performed under electrical and mechanical stress have been underway for over three years and show subpicoampere leakage levels. Silicon microprobes with built-in ribbon cables have remained functional for up to one year in the guinea pig CNS, recording driven single-unit activity and maintaining impedance levels in the 1-7 M Omega range.