Improving the Sensitivity and Bandwidth of In-Plane Capacitive Microaccelerometers Using Compliant Mechanical Amplifiers
Improving the Sensitivity and Bandwidth of In-Plane Capacitive Microaccelerometers Using Compliant Mechanical Amplifiers
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DOI：
10.1109/jmems.2014.2300231
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发表时间：
2014-08-01
影响因子：
2.7
通讯作者：
Ananthasuresh, G. K.
中科院分区：
文献类型：
--
作者：
Khan, Sambuddha;Ananthasuresh, G. K.
本文提出了一种利用柔性机械放大器提高面内电容式微加速度计灵敏度和带宽的方法，从而避免了灵敏度和带宽之间的折衷。在这里，我们比较了一个最敏感的单轴电容式加速度计和另一个具有较大的谐振频率在文献中报道的修改后的设计，其中包括位移放大顺应机制（DaCM）占据相同的足迹和相同的条件下。我们表明，前者的灵敏度提高了62%，带宽提高了34%，而后者则分别提高了27%和25%。这里还介绍了一种双轴加速度计，它使用一个悬架，该悬架沿两个平面内正交轴沿着放大位移。新的设计是微加工，封装和测试。该器件厚度为25 μ m，指间间隙可达4 m。尽管微制造工艺简单，但两个轴的测量轴向灵敏度（静态）均为约0.58 V/g，横轴灵敏度小于+/-2%。沿两个面内轴沿着测得的固有频率为920 Hz。在双轴加速度计中使用DaCM获得了6.2的位移放大率。[2013-0083]
This paper presents a method to enhance both the sensitivity and bandwidth of in-plane capacitive micromachined accelerometers by using compliant mechanical amplifiers, and thus obviating the compromise between the sensitivity and bandwidth. Here, we compare one of the most sensitive single-axis capacitive accelerometers and another with large resonant frequency reported in the literature with the modified designs that include displacement-amplifying compliant mechanisms (DaCMs) occupying the same footprint and under identical conditions. We show that 62% improvement in sensitivity and 34% improvement in bandwidth in the former, and 27% and 25% in the latter can be achieved. Also presented here is a dual-axis accelerometer that uses a suspension that decouples and amplifies the displacements along the two in-plane orthogonal axes. The new design was microfabricated, packaged, and tested. The device is 25-mu m thick with the interfinger gap as large as 4 m. Despite the simplicity of the microfabrication process, the measured axial sensitivity (static) of about 0.58 V/g for both the axes was achieved with a cross-axis sensitivity of less than +/- 2%. The measured natural frequency along the two in-plane axes was 920 Hz. Displacement amplification of 6.2 was obtained using the DaCMs in the dual-axis accelerometer. [2013-0083]