Toward magneto-nanophotonics based on thin-film yttrium iron garnet: wafer bonding and grinding for substrate preparation

Toward magneto-nanophotonics based on thin-film yttrium iron garnet: wafer bonding and grinding for substrate preparation
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基于薄膜钇铁石榴石的磁纳光子学:用于基板制备的晶圆键合和研磨

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发表时间:
2019
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通讯作者:
and S. Iwamoto
and S. Iwamoto
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作者:
S. Gao;Y. Ota;F. Tian;Y. Arakawa;and S. Iwamoto

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