Study of laser beam propagation in microholes and the effect on femtosecond laser micromachining
Study of laser beam propagation in microholes and the effect on femtosecond laser micromachining
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DOI：
10.1063/1.3595671
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发表时间：
2011-06
影响因子：
3.2
通讯作者：
S. Tao;Benxin Wu;S. Lei
中科院分区：
文献类型：
--
作者：
S. Tao;Benxin Wu;S. Lei
在飞秒（fs）激光微加工中，如微孔钻孔，先前激光脉冲产生的孔可能像波导一样，其侧壁可能显著影响后续激光脉冲传播到孔中的光束轮廓。这一效应对激光微加工的基础研究和实际应用具有重要意义，但目前文献研究还不够充分。本文通过数值求解瞬态麦克斯韦波动方程来研究这种效应。研究揭示了不同激光参数和孔参数下微孔对激光强度分布的影响，以及对激光微加工的影响。该研究为线偏振激光微加工中得到的椭圆孔形状提供了一个很好的基本物理解释。
In femtosecond (fs) laser micromachining, such as microhole drilling, the hole created by previous laser pulses may act like a waveguide, whose sidewall may significantly affect the beam profile of subsequent laser pulses propagating into the hole. This effect is very important for both the fundamental study and the practical applications of fs laser micromachining, but has not been well studied in literature. The effect is investigated in this paper by numerically solving the transient Maxwell’s wave equation. The study reveals how microholes affect laser intensity profile for different laser and hole parameters, and the implied effects on fs laser micromachining. The study has provided a good fundamental physical explanation for the elliptical hole shape obtained in fs laser micromachining with linearly polarized laser beams.