Three-dimensional electron tomography and recent expansion of its applications in materials science
Three-dimensional electron tomography and recent expansion of its applications in materials science
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DOI：
10.1093/jmicro/dfac071
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发表时间：
2023-01-21
期刊：
影响因子：
1.8
通讯作者：
Kaneko，Kenji
中科院分区：
文献类型：
--
作者：
Baba，Norio;Hata，Satoshi;Kaneko，Kenji
电子断层扫描（ET）是阐明材料性质和功能的有力工具。21世纪初，像差校正电子显微镜的创新发展，以及与ET相关的探测器、设备和装置的发展取得了显著进展，导致了分辨率的大幅提高。然而，不仅硬件的进步，而且重建算法和相关三维（3D）分析方法的显著发展都有助于分辨率的提高。ET有其自身的问题，包括由于倾斜角度范围有限而导致的楔形缺失问题，以及需要获取大量的标本倾斜图像，后者既耗时又可能损坏标本。这篇综述文章旨在(i)描述关于ET三维分辨率和实际3D分辨率测量方法的既定基本理论和定义，（ii）讨论有效克服上述问题的各种重建算法，（iii）描述材料科学中关于原子ET、分析ET和现场ET的核心应用的最新进展。在每个应用领域开发的每种方法都解决了上述环境技术问题。值得注意的是，就目标（ii）而言，最近开发的重建算法可以减少获得一定分辨率所需的投影图像（标本倾斜图像）的数量，而不违反Nyquist准则。这种方法被解释为一种新的非线性抽样定理。
Electron tomography (ET) is a powerful tool for elucidating the properties and functionalities of materials. The innovative development of aberration-corrected electron microscopy in the early 21st century and the remarkable progress in the development of detectors, equipment and devices related to ET have resulted in substantial improvements in resolution. However, not only advances in hardware but also remarkable developments in reconstruction algorithms and related three-dimensional (3D) analysis methods have contributed to the resolution improvements. ET has its own problems, including the missing-wedge problem due to the limited tilt-angle range and the need to acquire numerous specimen-tilt images, the latter of which is time-consuming and can potentially damage the specimen. This review paper aims to (i) describe the established basic theories and definitions regarding 3D resolution of ET and practical 3D resolution measurement methods, (ii) discuss various reconstruction algorithms that effectively overcome the aforementioned problems and (iii) describe recent progress in the core of ET applications in materials science with respect to atomic ET, analytical ET andin-situET. The aforementioned ET problems have been addressed with each method developed in each field of application. Notably, in terms of aim (ii), recently developed reconstruction algorithms can reduce the number of projection images (specimen-tilt images) needed to attain a certain resolution without violating the Nyquist criterion. This approach is interpreted as a novel non-linear sampling theorem.