Fabrication of a microlens array using micro-compression molding with an electroformed mold insert

Fabrication of a microlens array using micro-compression molding with an electroformed mold insert
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DOI:
10.1088/0960-1317/13/1/314
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发表时间:
2003-01-01
影响因子:
2.3
通讯作者:
Kang, S
Kang, S
中科院分区:
工程技术4区
文献类型:
--
作者:
Moon, SD;Lee, N;Kang, S

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聚合物微透镜阵列,直径为36-96 μ m,曲率半径为20-60 μ m和间距为250 μ m,制造使用微压缩成型与电铸模具插入。我们使用回流焊方法和电铸工艺,使母亲和金属模具插入,分别。微压缩成型与粉末聚合物开发复制微透镜。对微透镜的表面轮廓、成像质量和表面粗糙度进行了测量和分析。
Polymeric microlens arrays, with a diameter of 36-96 mum, a radius of curvature of 20-60 mum and a pitch of 250 mum, were fabricated Using micro-compression molding with electroformed mold inserts. We used the reflow method and the electroforming process to make the mother and the metallic mold inserts, respectively. Micro-compression molding with powder polymer was developed to replicate microlenses. The surface profiles, imaging qualities, and surface roughness of the microlenses were measured and analyzed.