Tuning the piezoelectric and mechanical properties of the AlN system via alloying with YN and BN
Tuning the piezoelectric and mechanical properties of the AlN system via alloying with YN and BN
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DOI：
10.1063/1.4993254
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发表时间：
2017-09-14
影响因子：
3.2
通讯作者：
Ciobanu, Cristian V.
中科院分区：
文献类型：
--
作者：
Manna, Sukriti;Brennecka, Geoff L.;Ciobanu, Cristian V.
微电子机械系统的最新进展往往需要多功能材料，其设计目的是优化不止一种性能。利用密度泛函理论对合金氮化物体系进行了计算，说明了不同氮化物对压电材料(AlN)的共合金化有助于同时调节其压电性和力学性能。纤锌矿AlN-YN合金的压电性随Yn浓度的增加而增加，并伴随着沿晶体c方向的机械软化。这两种效应都增加了与换能器和执行器相关的机电耦合系数。然而，谐振器的应用需要更高的刚度，因此需要将增加的压电响应与软化的晶格分离。我们发现，AlN与YN和BN的共合金化导致了弹性性能的改善，同时保留了YN合金化的一些压电增强效应。这一发现可能会为通过组成-性质图调整压电体的设计性质开辟新的途径。由AIP出版公司出版。
Recent advances in microelectromechanical systems often require multifunctional materials, which are designed so as to optimize more than one property. Using density functional theory calculations for alloyed nitride systems, we illustrate how co-alloying a piezoelectric material (AlN) with different nitrides helps tune both its piezoelectric and mechanical properties simultaneously. Wurtzite AlN-YN alloys display increased piezoelectric response with YN concentration, accompanied by mechanical softening along the crystallographic c direction. Both effects increase the electromechanical coupling coefficients relevant for transducers and actuators. Resonator applications, however, require superior stiffness, thus leading to the need to decouple the increased piezoelectric response from the softened lattice. We show that co-alloying of AlN with YN and BN results in improved elastic properties while retaining some of the piezoelectric enhancements from YN alloying. This finding may lead to new avenues for tuning the design properties of piezoelectrics through composition-property maps. Published by AIP Publishing.