Advanced materials for multilayer mirrors for extreme ultraviolet solar astronomy.
Advanced materials for multilayer mirrors for extreme ultraviolet solar astronomy.
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用于极紫外太阳天文学的多层镜的先进材料。
DOI：
10.1364/ao.55.002126
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发表时间：
2016
期刊：
影响因子：
1.9
通讯作者：
S. Zuev
中科院分区：
文献类型：
--
作者：
S. Bogachev;N. Chkhalo;S. Kuzin;D. E. Pariev;V. Polkovnikov;N. Salashchenko;S. Shestov;S. Zuev
我们对用于极紫外 (EUV) 太阳天文学的当代多层光学器件的波长范围进行了分析：λ=12.9-13.3 nm、λ=17-21 nm、λ=28-33 nm 和 λ=58.4 nm。我们发现了新的材料对，由于所提出的多层涂层具有高反射效率、光谱分辨率和长期稳定性，这将使新的星载实验成为可能。在λ=13nm的光谱范围内，与常用的Mo/Si相比，Mo/Be多层反射镜表现出了更好的反射效率和光谱分辨率。在λ=17-21nm的光谱范围内，提出了一种新的Al/Si多层结构，与常用的Al/Zr多层结构相比，该结构具有更高的光谱分辨率和相当的反射效率。在λ=30nm的光谱范围内，Si/B4C/Mg/Cr多层结构最符合反射效率和长期稳定性。 B4C和Cr层防止Si和Mg层的相互扩散。针对λ=58 nm的光谱范围，开发了一种新型多层Mo/Mg基结构；对其反射效率和长期稳定性进行了分析。我们还研究了大多数多层结构固有的固有应力，并提出了消除应力的可能性。
We provide an analysis of contemporary multilayer optics for extreme ultraviolet (EUV) solar astronomy in the wavelength ranges: λ=12.9-13.3 nm, λ=17-21 nm, λ=28-33 nm, and λ=58.4 nm. We found new material pairs, which will make new spaceborne experiments possible due to the high reflection efficiencies, spectral resolution, and long-term stabilities of the proposed multilayer coatings. In the spectral range λ=13 nm, Mo/Be multilayer mirrors were shown to demonstrate a better ratio of reflection efficiency and spectral resolution compared with the commonly used Mo/Si. In the spectral range λ=17-21 nm, a new multilayer structure Al/Si was proposed, which had higher spectral resolution along with comparable reflection efficiency compared with the commonly used Al/Zr multilayer structures. In the spectral range λ=30 nm, the Si/B4C/Mg/Cr multilayer structure turned out to best obey reflection efficiency and long-term stability. The B4C and Cr layers prevented mutual diffusion of the Si and Mg layers. For the spectral range λ=58 nm, a new multilayer Mo/Mg-based structure was developed; its reflection efficiency and long-term stability have been analyzed. We also investigated intrinsic stresses inherent for most of the multilayer structures and proposed possibilities for stress elimination.