Rapid manufacturing of embedded microchannels from a single layfrei SU-8, and determining the dependence of SU-8 young's modulus on exposure dose with a laser acoustic technique
Rapid manufacturing of embedded microchannels from a single layfrei SU-8, and determining the dependence of SU-8 young's modulus on exposure dose with a laser acoustic technique
复制标题
从单个雷弗雷 SU-8 快速制造嵌入式微通道，并使用激光声学技术确定 SU-8 杨氏模量对暴露剂量的依赖性
DOI：
10.1109/memsys.2005.1454014
复制
发表时间：
2005
期刊：
影响因子：
--
通讯作者：
Xin Zhang
中科院分区：
文献类型：
--
作者：
H. Yu;O. Balogun;B. Li;T. Murray;Xin Zhang
本文提出了一种快速制造嵌入式微通道的创新方法。所提出的技术是基于直接写入技术，使用扫描激光系统图案化单层SU-8。它大大简化了嵌入式微通道的制造过程，并不同于以前的工作，这是fimdamentallly由第三个维度（垂直于表面）的加工能力的限制。本文还介绍了基本的理论和方法，以确定曝光SU-8的杨氏模量，通过使用激光声显微镜系统。基于激光的超声技术提供了一种非接触、无损的评估和材料表征手段。它允许在显微镜的视野内对材料特性进行局部检查。
This paper presents an innovative methodology for rapid manufacturing embedded microchannels. The presented technology is based on a direct-write technique using a scanning laser system to pattern a single layered SU-8. It greatly simplifies the processes for embedded microchannels fabrication and differs from the previous work that was fimdamentaltlly limited by the third dimension (perpendicular to the surface) processing capability. This paper also describes the underlying theory and method to determine the Young’s modulus of exposed SU-8 by using a laser acoustic microscopy system. The laser-based ultrasonic technique offers a non-contact, nondestructive means of evaluation and materials characterization. It allows for local inspection of material properties within the field of view of the microscope.