Micromechanical sensors for chemical and physical measurements
Micromechanical sensors for chemical and physical measurements
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DOI：
10.1063/1.1145484
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发表时间：
1995-06
影响因子：
1.6
通讯作者：
E. A. Wachter;T. Thundat
中科院分区：
文献类型：
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作者：
E. A. Wachter;T. Thundat
廉价、批量生产的微悬臂的出现有望在化学和物理传感器设计领域带来一场革命。本文讨论了一种新型的高灵敏度传感器，这种传感器基于商业上可用的微悬臂梁，例如用于原子力显微镜的微悬臂梁。当涂上增敏层后，由于暴露于各种化学和物理现象，这些微悬臂梁在两个独立的分析物诱导信号，共振频率和静态弯曲方面表现出显着变化。谐振频移具有对热漂移等外部因素的干扰相对不敏感的特殊优点。基于这种方法的微机械传感器能够检测汞蒸气（灵敏度为1.25 Hz/pg，线性相关性为0.998），相对湿度（55 Hz/%R.H.），相关性=0.999)，或光辐照（10 Hz/nJ响应）的详细讨论，以及t…
The advent of inexpensive, mass‐produced microcantilevers promises to bring about a revolution in the field of chemical and physical sensor design. In this paper, a novel class of highly sensitive sensors are discussed that are based on commercially available microcantilevers, such as those used in atomic force microscopy. When coated with a sensitizing overlayer, these microcantilevers show significant changes in two independent analyte‐induced signals, resonance frequency and static bending, as the result of exposure to various chemical and physical phenomena. Resonance frequency shift has the particular advantage of being relatively insensitive to interference from external factors such as thermal drift. Examples of micromechanical sensors based on this approach that are capable of detecting mercury vapor (with a sensitivity of 1.25 Hz/pg and linear correlation of 0.998), relative humidity (55 Hz/%R.H., correlation=0.999), or optical irradiation (10 Hz/nJ response) are discussed in detail, along with t...