Ablation of metals by ultrashort laser pulses

Ablation of metals by ultrashort laser pulses
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DOI:
10.1117/12.617375
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发表时间:
2004-02
期刊:
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影响因子:
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通讯作者:
N. Nedialkov;P. Atanasov;D. Breitling;G. Heusel;F. Dausinger
N. Nedialkov;P. Atanasov;D. Breitling;G. Heusel;F. Dausinger
中科院分区:
其他
文献类型:
--
作者:
N. Nedialkov;P. Atanasov;D. Breitling;G. Heusel;F. Dausinger

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对持续时间为0.1皮秒、1皮秒和5皮秒的激光脉冲对铁、铝、镍和铜的烧蚀进行了实验研究。所使用的激光能量密度从低于烧蚀阈值到高达100焦耳/平方厘米不等。在激光能量密度高于几焦耳/平方厘米时,烧蚀速率取决于激光脉冲持续时间,因为较短的脉冲会产生更高的烧蚀速率。还观察到随着激光能量密度的增加烧蚀机制发生变化。对于所使用的所有脉冲持续时间,在能量密度高于10焦耳/平方厘米时,熔融材料的存在表现得很明显。这些效应可归因于电子热扩散对吸收能量分布的贡献。凝固的熔融材料的痕迹表明烧蚀的熔体喷射机制的实现。
Ablation of Fe, Al, Ni, and Cu by laser pulses at durations of 0.1, 1, and 5 ps is investigated experimentally. The laser fluence used vaires from below the ablation threshold up to 100 J/cm2. The ablation rate depends on the laser pulse duration at laser fluences above several J/cm2 as the shorter pulse produces higher ablation rate. A change of the ablation regime with the laser fluence increase is also observed. The presence of molten material is clearly expressed at fluences above 10 J/cm2 for all pulse durations used. These effects can be referred to the contribution of the electron heat diffusion in the distribution of the absorbed energy. The traces of solidified molten material suggest for realizations of melt ejection mechanism of ablation.