Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting
Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting
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DOI：
10.1063/1.1864249
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发表时间：
2005-02
影响因子：
4
通讯作者：
K. Takada;Hongbo Sun;S. Kawata
中科院分区：
文献类型：
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作者：
K. Takada;Hongbo Sun;S. Kawata
对基于聚合的激光微细加工中最小加工精度和最佳表面光滑度的基本问题进行了实验研究。通过在树脂中有意引入自由基猝灭剂，横向空间分辨率从先前报道的值120 nm提高到约100 nm。从10μm×10μm的表面区域测量的粗糙度平均值为4-11nm，发现其受激光脉冲能量的影响很小，但当小于临界值时与扫描间距无关。该层的表面质量完全可以满足各种光子器件的要求。
The fundamental issues on the smallest possible processing accuracy and the best feasible surface smoothness in pinpoint polymerization-based laser fabrication were experimentally investigated. The lateral spatial resolution is improved from the previously reported value, 120nm, to around 100nm by intentionally introducing radical quenchers in the resin. The roughness measured from 10μm×10μm surface areas were averaged to 4–11nm, which is found slightly affected by the laser pulse energy but independent on the scanning pitch when it is smaller than a critical value. The surface quality of this level could fully satisfy the requirement of various photonic elements and devices.