AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface
AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface
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DOI：
10.1016/j.precisioneng.2017.10.009
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发表时间：
2018
影响因子：
3.6
通讯作者：
Yanquan Geng;Yanquan Geng;E. Brousseau;Xuesen Zhao;Xuesen Zhao;M. Gensheimer;C. Bowen
中科院分区：
文献类型：
--
作者：
Yanquan Geng;Yanquan Geng;E. Brousseau;Xuesen Zhao;Xuesen Zhao;M. Gensheimer;C. Bowen
本文报道了一项研究，对提高吞吐量的原子力显微镜（AFM）的尖端为基础的纳米加工过程中，通过增加刀具和工件之间的界面处的切削速度。一个修改后的原子力显微镜设置，它结合了快速往复运动的压电致动器，其上安装的工件，和线性位移的原子力显微镜阶段，它定义了生产的凹槽的长度。详细研究了加工聚甲基丙烯酸甲酯时，进给量、进给方向和切削速度对加工深度和切屑形成的影响。当压电致动器往复运动的频率为40 kHz时，利用该设置可以实现超过5 m/min的理论切割速度。这明显优于基于AFM的纳米加工的现有技术，目前的纳米加工速度小于1 m/min。
This paper reports a study towards enhancing the throughput of the Atomic Force Microscope (AFM) tip-based nanomachining process by increasing the cutting speed at the interface between the tool and the workpiece. A modified AFM set-up was implemented, which combined the fast reciprocating motions of a piezoelectric actuator, on which the workpiece was mounted, and the linear displacement of the AFM stage, which defined the length of produced grooves. The influence of the feed, the feed direction and the cutting speed on the machined depth and on the chip formation was studied in detail when machining poly(methyl methacrylate). A theoretical cutting speed over 5 m/min could be achieved with this set-up when the frequency of the piezoelectric actuator reciprocating motions was 40 kHz. This is significantly better than the state of the art for AFM-based nanomachining, which is currently less than 1 m/min.