Phase corrections in the optical interferometer for Si sphere volume measurements at NMIJ
Phase corrections in the optical interferometer for Si sphere volume measurements at NMIJ
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DOI：
10.1088/0026-1394/48/2/s13
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发表时间：
2011-04-01
期刊：
影响因子：
2.4
通讯作者：
Mana, G.
中科院分区：
文献类型：
--
作者：
Andreas, B.;Ferroglio, L.;Mana, G.
为了确定固体密度标准品的体积，制造为Si晶体球，使用光学干涉仪在NMIJ测量它们的直径。为了支持和补充这些测量，古伊相的效果进行了研究分析和数值。在测量中，球体被放置在斐索腔的端镜之间，并且测量腔镜和球体之间的距离以及腔长度。本分析概述了一个模型的干涉仪操作和量化的古伊相位校正直径测量。
To determine the volume of solid density standards, manufactured as Si-crystal spheres, an optical interferometer is used to measure their diameter at the NMIJ. To support and complement these measurements, the effect of the Gouy phase has been studied analytically and numerically. In measurement, the sphere is placed between the end-mirrors of a Fizeau cavity and the distances between the cavity mirrors and the sphere are measured, as well as the cavity length. The present analysis outlines a model of the interferometer operation and quantifies the Gouy-phase correction in the diameter measurement.