Monolithic integration of vertical-cavity surface-emitting laser and diffractive optical element for advanced beam shaping
Monolithic integration of vertical-cavity surface-emitting laser and diffractive optical element for advanced beam shaping
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DOI：
10.1109/68.759379
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发表时间：
1999-05
影响因子：
2.6
通讯作者：
H. Martinsson;J. Bengtsson;M. Ghisoni;A. Larsson
中科院分区：
文献类型：
--
作者：
H. Martinsson;J. Bengtsson;M. Ghisoni;A. Larsson
We have demonstrated a vertical-cavity surface-emitting laser (VCSEL) with a monolithically integrated diffractive optical element (DOE) for advanced beam shaping. The DOE is a two-level surface relief, etched into the GaAs substrate beneath a bottom-emitting VCSEL. The combination generates a 4/spl times/4 array of focused spots 10 mm from the substrate with spot sizes down to less than 400 /spl mu/m, almost at the diffraction limit. Diffraction efficiencies of 29% and uniformity errors of 14% were measured.
