Fabrication and characterization of sputtered-carbon microelectrode arrays
Fabrication and characterization of sputtered-carbon microelectrode arrays
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DOI：
10.1021/ac9508816
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发表时间：
1996-06-01
影响因子：
7.4
通讯作者：
Woodward, DJ
中科院分区：
文献类型：
--
作者：
Sreenivas, G;Ang, SS;Woodward, DJ
本文描述了一种利用标准集成电路技术和硅微机械加工技术制造新型溅射沉积薄膜碳微电极阵列的可靠而可靠的工艺。研究了溅射沉积碳膜作为微电极材料的潜在候选材料。分别用原子力显微镜和扫描电子显微镜研究了微电极阵列的表面性质和截面。对阵列中微电极的电点阻抗、串扰和寿命(介电完整性)进行了表征。用快速扫描循环伏安法和计算机计时电流法研究了薄膜碳微电极对六铵盐和多巴胺的电化学响应，结果表明薄膜碳微电极具有良好的电化学性能。这种薄膜具有极好的电学、机械和化学性质，因此适合于各种电分析应用，特别是急性神经生理学研究。
This paper describes a robust and reliable process for fabricating a novel sputter-deposited, thin-film carbon microelectrode array using standard integrated circuit technologies and silicon micromachining. Sputter-deposited carbon films were investigated as potential candidates for microelectrode materials. The surface properties and cross section of the microelectrode arrays were studied by atomic force microscopy and scanning electron microscopy, respectively. Electrical site impedance, crosstalk, and lifetime (dielectric integrity) of microelectrodes in the array were characterized. Electrochemical response of the microelectrodes to hexaammineruthenium(III) chloride and dopamine were investigated by fast-scan cyclic voltammetry and high-speed, computer-based chronoamperometry; results show that thin-film carbon microelectrodes are well-behaved electrochemically. The thin carbon films offer extremely good electrical, mechanical, and chemical properties and thus qualify as viable candidates for various electroanalytical applications, particularly acute neurophysiological studies.