Plasma plume behavior of laser ablated cerium oxide: Effect of oxygen partial pressure
Plasma plume behavior of laser ablated cerium oxide: Effect of oxygen partial pressure
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激光烧蚀氧化铈的等离子体羽流行为：氧分压的影响
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
E. Mohandas
中科院分区：
文献类型：
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作者：
A. Panda;Akash Singh;M. Mishra;R. Thirumurugesan;P. Kuppusami;E. Mohandas
利用朗缪尔探针对激光烧蚀氧化铈靶的等离子体羽流进行了时间和空间研究。用KrF（λ ~ 248 nm）气体激光烧蚀氧化铈靶。实验研究证实，2 × 10 −2 mbar的氧分压足以获得高质量的氧化铈薄膜。在此压力下，诊断羽流的空间和时间行为。在距离目标15 mm、30 mm和最大距离45 mm处研究了空间分布，而在0至50 µS范围内记录了时间行为，间隔为0.5 µS。发现平均电子密度在距离目标位置30 mm处最大，并且发现激光烧蚀的氧化铈的等离子体电流在22 µS处最大。
This paper describes the spatial and temporal investigation of laser ablated plasma plume of cerium oxide target using Langmuir probe. Cerium oxide target was ablated using a KrF (λ ~ 248 nm) gas laser. Experimental studies confirmed that oxygen partial pressure of 2 × 10 −2 mbar is sufficient enough to get good quality films of cerium oxide. At this pressure, plume was diagnosed for their spatial and temporal behavior. Spatial distribution was investigated at a distance of 15 mm, 30 mm, and up to a maximum distance of 45 mm from the target, whereas temporal behavior has been recorded in the range of 0 to 50 µS with an interval of 0.5 µS. The average electron densities are found to be maximum at 30 mm from the target position and the plasma current of the laser ablated ceria is found to be maximum at 22 µS.