Three-dimensional reconstruction of buried nanoparticles by element-sensitive tomography based on inelastically scattered electrons

Three-dimensional reconstruction of buried nanoparticles by element-sensitive tomography based on inelastically scattered electrons
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基于非弹性散射电子的元素敏感断层扫描对埋藏纳米粒子的三维重建

DOI:
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发表时间:
2001
期刊:
影响因子:
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通讯作者:
B. Inkson
B. Inkson
中科院分区:
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文献类型:
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作者:
G. Möbus;B. Inkson

文献摘要

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能量过滤透射电子显微镜用于成像纳米复合材料FeAl+Y2O3,氧化物弥散强化的金属间合金,在±60°的倾斜范围内仅使用非弹性散射电子。利用电子光谱成像的性质,恢复三维化学浓度分布和显微照片之间的投影关系。这允许通过反投影恢复关于掩埋的纳米颗粒的体积形状、分布和均匀性的全部信息。在生物物体中常见的对低原子序数的限制在这里以较高的电子暴露为代价被克服。
Energy-filtered transmission electron microscopy is used to image the nanocomposite FeAl+Y2O3, an oxide-dispersion-strengthened intermetallic alloy, over a tilt range of ±60° using inelastically scattered electrons only. The properties of electron spectroscopic imaging are exploited to recover a projection relationship between the three-dimensional chemical concentration distribution and the micrographs. This allows recovery of the full information on volume shape, distribution, and homogeneity of the buried nanoparticles by backprojection. Restrictions to low atomic number, common in bio-objects, are here overcome at the expense of higher electron exposures.