A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems
A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems
复制标题
用于微型机器人装配系统的微机械坡莫合金磁致动器阵列
DOI：
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发表时间：
1995
期刊：
影响因子：
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通讯作者：
Chih
中科院分区：
文献类型：
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作者：
Chang Liu;T. Tsao;Y. Tai;Wenheng Liu;P. Will;Chih
坡莫合金磁致动器阵列已被研究用于精密微机器人装配系统。致动器阵列已经过测试，用于提升和移动硅和玻璃芯片。致动器单元由1 mm x 1 mm X 5/spl mu/m大小的坡莫合金板以及多晶硅弯曲支撑件组成。实验上，它可以在大约2 x 10/sup 4/ A/m的磁场下举起87 /spl mu/N（或8.88 mg）的力。已观察到一种建议的同步驱动模式，并已证明了硅芯片的平移和旋转。
Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm x 1 mm X 5/spl mu/m in size together with polysilicon bending supports. Experimentally, it can lift a 87 /spl mu/N (or 8.88 mg) force under a magnetic field of approximately 2 x 10/sup 4/ A/m. A proposed synchronous driving mode has been observed, and both translation and rotation of a silicon chip has been demonstrated.