Flexible High-Conductivity Carbon-Nanotube Interconnects Made by Rolling and Printing
Flexible High-Conductivity Carbon-Nanotube Interconnects Made by Rolling and Printing
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DOI：
10.1002/smll.200900741
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发表时间：
2009-11-02
期刊：
影响因子：
13.3
通讯作者：
Hart, A. J.
中科院分区：
文献类型：
--
作者：
Tawfick, S.;O'Brien, K.;Hart, A. J.
碳纳米管（CNTs）和互补金属氧化物半导体（CMOS）为基础的电子和能源器件的应用受到阻碍，因为典型的低碳纳米管面密度，生长温度与器件衬底不兼容，以及在大面积对准和互连方面的挑战。提出了一种可扩展的密集水平排列碳纳米管（HA-CNT）带状互连的连续制造和转移印刷方法。该工艺结合了热化学气相沉积的垂直排列碳纳米管（VA-CNT）生长，将VA-CNTs转化为HA-CNTs的新型机械轧制工艺，以及不需要载体膜的粘附控制转移印刷。轧制力决定了HA-CNT的堆积率，HA-CNT采用常规光刻工艺处理。电阻率为2m ω。对于厚度为800纳米的条带，测量的电阻率为cm，而铜的电阻率要低100倍，这一值超过了迄今为止制造的大多数碳纳米管组件，并且可以显著改善碳纳米管的结构质量。这种滚动和印刷过程可以扩展到整个晶圆区域，更复杂的结构，如连续的碳纳米管片和多向图案，可以通过碳纳米管生长过程和/或多个滚动和印刷序列的直接设计来实现。
Applications of carbon nanotubes (CNTs) inflexible and complementary metal-oxide-semiconductor (CMOS)-based electronic and energy devices are impeded due to typically low CNT areal densities, growth temperatures that are incompatible with device substrates, and challenges in large-area alignment and interconnection. A scalable method for continuous fabrication and transfer printing of dense horizontally aligned CNT (HA-CNT) ribbon interconnects is presented. The process combines vertically aligned CNT (VA-CNT) growth by thermal chemical vapor deposition, a novel mechanical rolling process to transform the VA-CNTs to HA-CNTs, and adhesion-con trolled transfer printing without needing a carrier film. The rolling force determines the HA-CNT packing fraction and the HA-CNTs are processed by conventional lithography. An electrical resistivity of 2 m Omega . cm is measured for ribbons having 800-nm thickness, while the resistivity of copper is 100 times lower, a value that exceeds most CNT assemblies made to date, and significant improvements can be made in CNT structural quality. This rolling and printing process could be scaled to full wafer areas and more complex architectures such as continuous CNT sheets and multidirectional patterns could be achieved by straightforward design of the CNT growth process and/or multiple rolling and printing sequences.