Development of a bi-directional valve-less silicon micro pump controlled by driving waveform
Development of a bi-directional valve-less silicon micro pump controlled by driving waveform
复制标题
驱动波形控制双向无阀硅微泵的研制
DOI：
10.1016/s0924-4247(02)00322-9
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发表时间：
2003
影响因子：
4.6
通讯作者：
Koji Yamamoto
中科院分区：
文献类型：
--
作者：
S. Hayamizu;K. Higashino;Y. Fujii;Y. Sando;Koji Yamamoto
基于等效电路模型分析，提出了一种新型双向无阀硅微型泵，并对其性能进行了研究。可以通过改变施加到固定在隔膜上的PZT板的驱动波形来控制泵的流动方向。通过实验验证了这种新的双向泵送原理的可行性。该泵产生的正向最大流量为 393nl/s，反向最大流量为 323nl/s，正向最大泵送压力为 11.0kPa，反向最大泵送压力为 9.9kPa。
A new bi-directional valve-less silicon micro pump was proposed based on an analysis using an equivalent circuit model, and the performance of the fabricated pump was studied. The flow direction of the pump can be controlled by changing a driving waveform applied to a PZT plate fixed on a diaphragm. The feasibility of this new bi-directional pumping principle was verified by experiments. The pump generated maximum flow rates of 393nl/s for forward direction and 323nl/s for backward direction and maximum pumping pressures of 11.0kPa for forward direction and 9.9kPa for backward direction.