TRIBOLOGICAL PROPERTIES OF SOFT-METAL / DLC COMPOSITE COATINGS PREPARED BY RF MAGNETRON SPUTTER USING COMPOUND TARGETS
TRIBOLOGICAL PROPERTIES OF SOFT-METAL / DLC COMPOSITE COATINGS PREPARED BY RF MAGNETRON SPUTTER USING COMPOUND TARGETS
复制标题
射频磁控溅射复合靶材制备软金属/DLC复合涂层的摩擦学性能
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
and Tetsuhiro Nawata
中科院分区:
文献类型:
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作者:
Minoru GOTO;Minoru ODA;and Tetsuhiro Nawata