Impact of the closed-loop phase shift on the frequency stability of capacitive MEMS oscillators
Impact of the closed-loop phase shift on the frequency stability of capacitive MEMS oscillators
复制标题
闭环相移对电容式 MEMS 振荡器频率稳定性的影响
DOI：
10.1109/dtip.2016.7514862
复制
发表时间：
2016
期刊：
影响因子：
--
通讯作者：
F. V. D. Santos
中科院分区：
文献类型：
--
作者：
A. Brenes;J. Juillard;F. V. D. Santos
相位噪声是基于 MEMS 的谐振传感器的一个线索性能指标。这些传感器可实现的最佳分辨率受到机械谐振器噪声源调制产生的接近载波相位噪声的限制。在本文中，我们重点研究白噪声输入源对单侧电容式 MEMS 谐振器的影响。我们研究闭环相移如何影响其频率稳定性。我们的研究揭示了最佳点的存在，具有相位噪声最小化和 SNR 最大化，这是传统的三阶泰勒级数方法无法预测的。我们发现，由于静电非线性对致动力的调制，调整闭环相移以提高振荡器频率稳定性尤其重要。
Phase noise is a clue performance indicator for MEMS-based resonant sensors. The optimal resolution achievable with these sensors is limited by the close-to-the-carrier phase noise resulting from the modulation of noise sources by the mechanical resonator. In this paper, we focus on the effect of a white noise input source on a one-sided capacitive MEMS resonator. We study how the closed-loop phase shift affects its frequency stability. Our study reveals the existence of optimal points, with phase noise minimization and SNR maximization, which cannot be predicted by a traditional third-order Taylor-Series approach. We reveal that, due to the modulation of the actuation force by the electrostatic nonlinearity, tuning the closed-loop phase shift to improve the oscillator frequency stability is especially relevant.
DOI：
10.1103/physreve.86.056207
发表时间：
2012-11
期刊：
Physical review. E, Statistical, nonlinear, and soft matter physics
影响因子：
--
作者：
Kenig E;Cross MC;Villanueva LG;Karabalin RB;Matheny MH;Lifshitz R;Roukes ML
通讯作者：
Roukes ML
影响因子：
8.6
作者：
Villanueva LG;Kenig E;Karabalin RB;Matheny MH;Lifshitz R;Cross MC;Roukes ML
通讯作者：
Roukes ML