Silicon Nitride in Silicon Photonics
Silicon Nitride in Silicon Photonics
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DOI：
10.1109/jproc.2018.2861576
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发表时间：
2018-12-01
影响因子：
20.6
通讯作者：
Roeloffzen, Chris
中科院分区：
文献类型：
--
作者：
Blumenthal, Daniel J.;Heideman, Rene;Roeloffzen, Chris
氮化硅（Si 3 N4）平面波导平台已经实现了广泛类别的低损耗平面集成器件和芯片级解决方案，这些器件和解决方案受益于宽波长范围（400-2350 nm）上的透明性和使用晶圆级工艺的制造。作为绝缘体上硅（SOI）和III-V光子学的补充平台，Si 3 N4波导技术开辟了新一代单靠其他平台无法实现的片上系统应用。低损耗波导（< 1 dB/m）的可用性可以处理高光功率，可以设计用于线性和非线性光学功能，并且支持各种无源和有源构建模块，为片上系统实现开辟了新的途径。随着信号带宽和数据速率的不断增加，Si 3 N4所实现的光路功能和复杂性已经扩展了光信号处理功能的实际应用，这些功能可以降低当今数字电子解决方案的能耗、尺寸和成本。研究人员已经能够将性能光子集成组件推向其他集成平台，包括SQUID谐振器，光学滤波器，高相干激光器，光学信号处理电路，非线性光学器件，频率梳发生器和生物光子片上系统。本文综述了低损耗氮化硅波导技术的发展历史、各种器件和应用的全球研究概况以及氮化硅铸造厂的现状。
The silicon nitride (Si3N4) planar waveguide platform has enabled a broad class of low-loss planar-integrated devices and chip-scale solutions that benefit from transparency over a wide wavelength range (400-2350 nm) and fabrication using wafer-scale processes. As a complimentary platform to silicon-on-insulator (SOI) and III-V photonics, Si3N4 waveguide technology opens up a new generation of system-on-chip applications not achievable with the other platforms alone. The availability of low-loss waveguides (< 1 dB/m) that can handle high optical power can be engineered for linear and nonlinear optical functions, and that support a variety of passive and active building blocks opens new avenues for system-on-chip implementations. As signal bandwidth and data rates continue to increase, the optical circuit functions and complexity made possible with Si3N4 has expanded the practical application of optical signal processing functions that can reduce energy consumption, size and cost over today's digital electronic solutions. Researchers have been able to push the performance photonic-integrated components beyond other integrated platforms, including ultrahigh Q resonators, optical filters, highly coherent lasers, optical signal processing circuits, nonlinear optical devices, frequency comb generators, and biophotonic system-on-chip. This review paper covers the history of low-loss Si3N4 waveguide technology and a survey of worldwide research in a variety of device and applications as well as the status of Si3N4 foundries.