Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction
Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction
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DOI：
10.1088/1361-6439/ac2e46
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发表时间：
2021-12-01
影响因子：
2.3
通讯作者：
Toshiyoshi, Hiroshi
中科院分区：
文献类型：
--
作者：
Honma, Hiroaki;Tohyama, Yukiya;Toshiyoshi, Hiroshi
我们报告了一种设计方法，通过减少对净输出没有贡献的无功功率来提高振动微机电系统（MEMS）静电能量收集器的输出功率。利用驻极体阻尼谐振发生器的等效电路模型，分析研究了增强有功电流、降低无功电流的机理。与接触垫和电气互连相关的内部寄生电容的减少显着改善了功率因数并增加了可输送的功率。该设计策略应用于实际器件，该器件在 158 Hz 下以 0.65 G（1 G = 9.8 m s(-2)）的振动产生 1.3 mW 的功率，表明通过将埋氧化层厚度从 1 μm 增加到 3 μm，输出功率可提高 2.9 倍。
We report a design method to enhance the output power of vibrational microelectromechanical system (MEMS) electrostatic energy harvesters by reducing the reactive power that does not contribute to the net output. The mechanism of enhancing the active current while reducing the reactive current is analytically studied using an equivalent circuit model of electret-based velocity-damped resonant-generator. Reduction of the internal parasitic capacitance associated to the contact pads and electrical interconnections significantly improves the power factor and increases the deliverable power. The design strategy is applied to an actual device that produces 1.3 mW from the vibrations of 0.65 G (1 G = 9.8 m s(-2)) at 158 Hz, suggesting a 2.9-fold enhancement of output power by increasing the buried oxide layer thickness from 1 mu m to 3 mu m.