MEMS for Plasmon Control of Optical Metamaterials
MEMS for Plasmon Control of Optical Metamaterials
复制标题
DOI：
10.1109/jstqe.2014.2385957
复制
发表时间：
2015-07-01
影响因子：
4.9
通讯作者：
Hane, Kazuhiro
中科院分区：
文献类型：
--
作者：
Kanamori, Yoshiaki;Hokari, Ryohei;Hane, Kazuhiro
异向介质作为具有独特光学特性的人工电磁材料引起了人们极大的关注，并被期待着各种创新的光学应用。基于微机电系统（MEMS）的可重构超材料是主动光学控制的候选技术。在本文中，我们专注于基于MEMS的可重构超材料在可见光和近红外波长之间的光学区域操作。简要介绍了MEMS致动器驱动的静态光学超材料和有源光学超材料。最后，结合计算结果，讨论了光学超材料微加工过程中应考虑的问题。
Metamaterials have attracted a great deal of attention as artificial electromagnetic materials having unique optical characteristics, and various innovative optical applications have been expected. Micro electromechanical systems (MEMS)-based reconfigurable metamaterials are candidate technologies for active optical control. In this paper, we focus on MEMS-based reconfigurable metamaterials operated in the optical region between visible and near-infrared wavelengths. A brief overview of static optical metamaterials and active optical metamaterials driven by MEMS actuators is presented. Moreover, points to be considered for a micromachining process of optical metamaterials are discussed with results of calculations.