From 2D STXM to 3D Imaging: Soft X-ray Laminography of Thin Specimens.
From 2D STXM to 3D Imaging: Soft X-ray Laminography of Thin Specimens.
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DOI：
10.1021/acs.nanolett.9b04782
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发表时间：
2020-01
期刊：
影响因子：
10.8
通讯作者：
K. Witte;A. Späth;S. Finizio;C. Donnelly;B. Watts;B. Sarafimov;M. Odstrčil;M. Guizar‐Sicairos;M. Holler;R. Fink;J. Raabe
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文献类型：
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作者：
K. Witte;A. Späth;S. Finizio;C. Donnelly;B. Watts;B. Sarafimov;M. Odstrčil;M. Guizar‐Sicairos;M. Holler;R. Fink;J. Raabe
X 射线断层扫描已成为研究具有高空间分辨率的复杂 3D 内部结构不可或缺的工具。使用软 X 射线的 3D 成像提供了强大的对比机制，但由于探测光束能量低得多所带来的限制，在断层扫描方面取得的成功有限。分层摄影的广义几何结构以倾斜的旋转轴为特征，为研究扩展（毫米范围）但薄（μm 至 nm）的样品提供了纳米级 3D 分辨率，这些样品非常适合软 X 射线研究。这项工作报告了在瑞士 Paul Scherrer 光源研究所的 PolLux 光束线扫描透射 X 射线分光显微镜上实施软 X 射线层析成像 (SoXL)，它能够对 270 eV 至 1500 eV 的扩展样本进行 3D 成像。软 X 射线成像为分子键和氧化态的化学敏感性以及磁二色性提供了对比机制，因为在此能量范围内 X 射线的衰减更强。所展示的应用示例范围从功能化纳米材料到生物光子晶体和复杂的纳米结构磁畴图案，从而说明了可以从 SoXL 中受益的广泛研究领域。
X-ray tomography has become an indispensable tool for studying complex 3D interior structures with high spatial resolution. 3D imaging using soft X-rays offers powerful contrast mechanisms, but has seen limited success with tomography due to the restrictions imposed by the much lower energy of the probe beam. The generalized geometry of laminography, characterized by a tilted axis of rotation, provides nm-scale 3D resolution for the investigation of extended (mm range) but thin (μm to nm) samples that are well suited to soft X-ray studies. This work reports on the implementation of soft X-ray laminography (SoXL) at the scanning transmission X-ray spectromicroscope of the PolLux beamline at the Swiss Light Source, Paul Scherrer Institut, which enables 3D imaging of extended specimens from 270 eV to 1500 eV. Soft X-ray imaging provides contrast mechanisms for both chemical sensitivity to molecular bonds and oxidation states and magnetic dichroism due to the much stronger attenuation of X-rays in this energy range. The presented examples of applications range from functionalized nanomaterials to biological photonic crystals and sophisticated nanostructured magnetic domain patterns, thus illustrating the wide fields of research that can benefit from SoXL.