Advances in scanning force microscopy for dimensional metrology
Advances in scanning force microscopy for dimensional metrology
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DOI：
10.1016/j.cirp.2006.10.010
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发表时间：
2006-01-01
影响因子：
4.1
通讯作者：
Kunzmann, H.
中科院分区：
文献类型：
--
作者：
Danzebrink, H. -U.;Koenders, L.;Kunzmann, H.
本文介绍了扫描力显微镜在尺寸计量中的应用现状。本文从微观角度对影响扫描力显微镜主要部件的重要因素作了详细的阐述。仪器的设计和校准讨论了工业应用的概述。介绍了国家计量机构和其他机构最近在改进校准程序、溯源性、降低测量不确定度、确保测量一致性和扩大应用范围方面取得的成就。
This paper presents the state of the art in scanning force microscopy for dimensional metrology. A detailed description is given of the important factors affecting the major components of a scanning force microscope from the metrological point of view. Both instrument design and calibration are discussed together with an overview of industrial applications. Recent achievements by national metrology institutes and others to improve calibration procedures, traceability, reduce measurement uncertainty, ensure consistancy of measurement and broaden the range of applications are described.