Thin-film friction and adhesion studies using atomic force microscopy
Thin-film friction and adhesion studies using atomic force microscopy
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DOI：
10.1063/1.371998
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发表时间：
2000-02-01
影响因子：
3.2
通讯作者：
Dandavate, C
中科院分区：
文献类型：
--
作者：
Bhushan, B;Dandavate, C
利用原子力显微镜研究了针尖半径和湿度对附着力和摩擦系数的影响。研究的样品是Si（100）、2nm厚的粘结全氟聚醚润滑剂（Z-DOL）涂覆的Si（100）、20 nm厚的类金刚石碳（DLC）涂覆的Si（100）和等离子体蚀刻的DLC涂覆的Si（100）。针尖直径范围从100 nm到14.5 μ m。据观察，粘附力和摩擦系数都强烈依赖于尖端半径和湿度。这种变化是由水蒸气的毛细凝结形成弯月面桥引起的。由于DLC涂层表面钝化，其对半径和湿度的变化相当不敏感。DLC的蚀刻活化了表面，使其对环境敏感。此外，一种技术被开发出来，以获得表面的粘附力地图，它可以用来获得一个估计的膜厚度只有一对夫妇的单层厚。这种技术的例子和应用。(C)2000年美国物理学会。[S0021-8979（00）05503-1]。
An atomic force microscope is used to study the effect of tip radius and humidity on the adhesive force and coefficient of friction. Samples studied are Si (100), 2 nm thick bonded perfluoropolyether lubricant (Z-DOL) coated Si (100), 20 nm thick diamond-like carbon (DLC) coated Si (100) and plasma etched DLC coated Si (100). Tip diameters ranged from 100 nm to 14.5 mu m. It is observed that both adhesive force and coefficient of friction are strongly dependent on the tip radius and humidity. The change is caused by the formation of meniscus bridges from capillary condensation of water vapor. DLC coated surface is rather insensitive to the changes in the radius and humidity because of its passivated surface. Etching of DLC activates the surface and makes it sensitive to the environment. In addition, a technique is developed to get adhesive force maps of surfaces, which can be used to obtain an estimate of film thickness only a couple of monolayers thick. Examples and applications of this technique are presented. (C) 2000 American Institute of Physics. [S0021-8979(00)05503-1].