Revisiting an influence of island edges on electrical characteristics of pseudo-MOSFET method
Revisiting an influence of island edges on electrical characteristics of pseudo-MOSFET method
复制标题
重新审视岛边对伪 MOSFET 方法电特性的影响
DOI:
10.1109/eurosoi-ulis49407.2020.9365378
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发表时间:
2020
期刊:
影响因子:
--
通讯作者:
Shingo Sato
中科院分区:
文献类型:
--
作者:
Daigo Mori;Shingo Sato
The influence of island edges on the electrical characteristics of the pseudo-MOSFET method is revisited using the Kelvin pseudo-MOSFET method. We clarify the necessity to use the dual configuration Kelvin pseudo-MOSFET method to precisely extract the electrical parameters like channel resistance, carrier mobility and so on without using any complicated analytical model.