Thin micropatterned multi-walled carbon nanotube films for electrodes
Thin micropatterned multi-walled carbon nanotube films for electrodes
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DOI：
10.1016/j.cplett.2013.07.047
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发表时间：
2013-09-17
影响因子：
2.8
通讯作者：
Kordas, Krisztian
中科院分区：
文献类型：
--
作者：
Halonen, Niina;Maklin, Jani;Kordas, Krisztian
基于薄的多壁碳纳米管膜的微图案化电极通过催化化学气相沉积在光刻限定的石英和Inconel合金衬底上生长。发现在纳米管阵列的根部与石英表面上的薄Ti硬掩模层之间的界面处的电接触是不良的，从而禁用适当的电容特性。另一方面，纳米管-铬镍铁合金电极显示出接近理想器件的低串联电阻和良好的双电层电容器操作。相对于未图案化的块状碳纳米管膜电极，电极的图案化增强了比电容和功率。(C)2013年爱思唯尔B。V.保留所有权利。
Micropatterned electrodes based on thin multi-walled carbon nanotube films are grown by catalytic chemical vapour deposition on lithographically defined quartz and Inconel alloy substrates. The electrical contact at the interface between the root of the nanotube arrays and the thin Ti hardmask layer on the quartz surface is found to be poor disabling proper capacitive characteristics. On the other hand, nanotube-Inconel electrodes show low series resistance and good electric double layer capacitor operation close to that of ideal devices. Patterning of the electrodes enhances both specific capacitance and power in reference to non-patterned bulk carbon nanotube film electrodes. (C) 2013 Elsevier B. V. All rights reserved.