ϕ ( ρz ) Distributions in Bulk and Thin-Film Samples for EPMA. Part 2: BadgerFilm: A New Thin-Film Analysis Program
ϕ ( ρz ) Distributions in Bulk and Thin-Film Samples for EPMA. Part 2: BadgerFilm: A New Thin-Film Analysis Program
复制标题
EPMA 散装和薄膜样品中的 Ï ( Ïz ) 分布。
DOI：
10.1017/s1431927620024927
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发表时间：
2021
影响因子：
2.8
通讯作者：
Fournelle, John
中科院分区：
文献类型：
--
作者：
Moy, Aurélien;Fournelle, John
自20世纪60年代以来，利用电子探针显微分析的无损技术测定了薄膜样品的厚度和成分。这种方法在20世纪90年代得到改进，它基于电离深度分布模型，即所谓的φ (ρz)分布，并且能够分析分层样品。这些量化模型大多数都产生了商业项目。然而，这些程序可能有一些限制：有些可能不能直接与现代计算机兼容，它们通常是“黑盒子”，使评估结果的可靠性变得困难，而且它们有时足够昂贵，使许多实验室无法购买它们。我们提出了一个用户友好的，免费的，开源的程序，BadgerFilm，实现了一个记录的φ (ρz)模型和算法，允许分层样本的量化。该程序具有计算绝对x射线强度的能力，可以直接与蒙特卡罗模拟进行比较。我们给出了在薄膜中employedφ (ρz)模型的操作的详细解释。广泛的详细蒙特卡罗模拟和实验数据已被用来评估和验证所实现算法的准确性。BadgerFilm在许多情况下为薄膜和衬底展示了出色的定量结果。
Since the 1960s, thicknesses and compositions of thin-film specimens have been determined by using the nondestructive technique of electron probe microanalysis. This approach, refined in the 1990s, is based upon models of the ionization depth distribution, the so-calledϕ(ρz) distribution, and is capable of analyzing layered specimens. Most of these quantification models have led to commercial programs. However, these programs may have possible limitations: some may not be directly compatible with modern computers, they often are “black boxes” making it difficult to assess the reliability of the results, and they are sometimes expensive enough to restrain many labs from purchasing them. We present a user-friendly, free, open-source program, BadgerFilm, implementing a documentedϕ(ρz) model and algorithms allowing the quantification of stratified samples. The program has the ability to calculate absolute X-ray intensities that can be directly compared with Monte Carlo simulations. We give a detailed explanation for the operation of the employedϕ(ρz) model in thin films. A wide range of detailed Monte Carlo simulations and experimental data have been used to evaluate and validate the accuracy of the implemented algorithms. BadgerFilm demonstrated excellent quantification results for the films and in many cases for the substrates.