Surface micromachined metallic microneedles
Surface micromachined metallic microneedles
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DOI：
10.1109/jmems.2003.809951
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发表时间：
2003-06-01
影响因子：
2.7
通讯作者：
Frazier, AB
中科院分区：
文献类型：
--
作者：
Chandrasekaran, S;Brazzle, JD;Frazier, AB
本文介绍了一种表面微加工空心金属微针的制作方法。制造、包装和表征了具有过程使能特征（诸如复杂尖端几何形状、微倒钩、机械穿透止动件和多个流体输出端口）的单微针和多微针阵列。微针的制造使用电镀金属，包括钯，钯钴合金和镍作为结构材料。微针的长度为200 mm-2.0 cm，横截面的宽度为70-200 μ m，高度为75-120 μ m，壁厚为30-35 μ m。微针阵列通常为9.0 mm宽和3.0 mm高，每个阵列3至17根针。使用水作为流体介质，发现对于1000穆尔/h的流速，平均入口压力为30.0 KPa，对于4000穆尔/h的流速，平均入口压力为106 KPa。
In this paper, a method for fabricating surface micromachined, hollow, metallic microneedles is described. Single microneedle and multiple microneedle arrays with process enabled features such as complex tip geometries, micro barbs, mechanical penetration stops and multiple fluid output ports were fabricated, packaged and characterized. The microneedles were fabricated using electroplated metals including palladium, palladium-cobalt alloys and nickel as structural materials. The microneedles were 200 mm-2.0 cm in length with a cross-section of 70-200 mum in width and 75-120 mum in height, with a wall thickness of 30-35 mum. The microneedle arrays were typically 9.0 mm in width and 3.0 mm in height with between 3 and 17 needles per array. Using water as the fluid medium, the average inlet pressure was found to be 30.0 KPa for a flow rate of 1000 muL/h and 106 KPa for a flow rate 4000 muL/h.