Study on Micro-EDM (1 st Repo.rt)
Study on Micro-EDM (1 st Repo.rt)
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微细电火花加工研究（1st Repo.rt）
DOI：
10.2526/jseme.28.32
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
T. Masuzawa
中科院分区：
文献类型：
--
作者：
K. Kawata;Takeo Sato;T. Masaki;T. Masuzawa
本文研究了微放电加工技术，它能实现微机械系统的三维加工。在弛豫型脉冲发生器中，最小放电能量取决于杂散电容。轴承和加工台底座等机械部件采用陶瓷材料，可获得较小的杂散电容。小放电能量时，电极和工件容易发生粘附。在微细电火花加工中，电极的旋转是必不可少的，因为电极的旋转可以避免粘附。通过将安装电极的心轴直接放置在V形块上，可以实现精确的旋转。通过这种改进，实现了优于0.51μm的旋转精度。由于弯曲和跳动对于小尺寸电极来说太大，因此必须在与加工相同的设置下形成电极。采用反向放电法在机床上实现了成形。
This paper deals with micro-electrodischarge machining which enables three-dimensional machining of micromechanical systems.In a relaxation type pulse generator, the minimum discharge energy depends on the stray capacitance. A small stray capacitance was achieved by using ceramic material for the mechanical components such as the bearing and machining table base.Adhesion of the electrode and workpiece tends to occur for small discharge energies. The rotation of the electrode is indispensable in micro-electrodischarge machining since the adhesion is avoided by applying it. An accurate rotation was achieved by laying the mandrel, which installs the electrode, directly on the V-shaped block. This modification realized an accuracy of rotation better than 0.51μm.Since the bending and runout were too large for small-size electrodes, it was necessary to form electrodes under the same setup as in machining. The formation was realized on the machine using the reverse discharge method.