Phase-shifting interferometry: minimization of systematic errors
Phase-shifting interferometry: minimization of systematic errors
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DOI：
10.1117/1.602443
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发表时间：
2000-04
影响因子：
1.3
通讯作者：
P. Hariharan
中科院分区：
文献类型：
--
作者：
P. Hariharan
移相干涉测量法现在被广泛地用于映射光学表面与参考平面或参考球面的偏差。然而，这种测量的准确性受到由于若干原因引起的系统误差的限制。这些系统误差可以通过简单的平均技术来最小化。© 2000年摄影光学仪器工程师协会。（S0091-3286（00）02103-6）
Phase-shifting interferometry is now used widely to map the deviations of optical surfaces from a reference plane or reference sphere. However, the accuracy of such measurements is limited by sys- tematic errors due to several causes. These systematic errors can be minimized by a simple averaging technique. © 2000 Society of Photo-Optical Instrumentation Engineers. (S0091-3286(00)02103-6)