Two‐photon laser‐induced fluorescence measurements of absolute atomic hydrogen densities and powder formation in a silane discharge
Two‐photon laser‐induced fluorescence measurements of absolute atomic hydrogen densities and powder formation in a silane discharge
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双光子激光诱导荧光测量硅烷放电中的绝对原子氢密度和粉末形成
DOI：
10.1116/1.578831
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
A. Matsuda
中科院分区：
文献类型：
--
作者：
U. Czarnetzki;K. Miyazaki;T. Kajiwara;K. Muraoka;T. Okada;M. Maeda;A. Suzuki;A. Matsuda
通过双光子激光诱导荧光光谱法在硅烷射频放电中测量绝对和空间分辨的氢密度。激发波长为205 nm，观察波长为656 nm（Balmer alpha）。在流管反应器中的滴定用于校准的检测系统，使第一次可靠的绝对氢密度的测定在硅烷放电。此外，观察到自发以及激光诱导的粉末形成。
Absolute and spatially resolved hydrogen densities were measured in a silane radio frequency discharge by two‐photon laser induced fluorescence spectroscopy. The excitation wavelength was 205 nm and the observation wavelength was 656 nm (Balmer alpha). Titration in a flow tube reactor was used for calibration of the detection system, enabling for the first time the determination of reliable absolute hydrogen densities in a silane discharge. In addition, spontaneous as well as laser induced powder formation was observed.