A polydimethylsiloxane (PDMS) deformable diffraction grating for monitoring of local pressure in microfluidic devices
A polydimethylsiloxane (PDMS) deformable diffraction grating for monitoring of local pressure in microfluidic devices
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DOI：
10.1088/0960-1317/12/1/301
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发表时间：
2002-01-01
影响因子：
2.3
通讯作者：
Maeda, R
中科院分区：
文献类型：
--
作者：
Hosokawa, K;Hanada, K;Maeda, R
提出了一种利用可变形衍射光栅监测微流控器件局部压力的新方法。用透明有机硅弹性体-聚二甲基硅氧烷(PDMS)-使用复制模塑技术制造了一种测试装置。模制的PDMS芯片和平板玻璃板具有结合界面，该界面限定了2 mm×2 mm的衍射光栅和200微米宽、20微米深的微通道。该光栅由5微米宽、2微米深的矩形凹槽组成，并以10微米的周期排列。所有的凹槽都连接到微通道上，并在内部压力下变形。给出了该器件在-80~100kPa压力范围内的光学响应，并与理论预测进行了比较。该试验装置还可用于测量0~0.3mlmin(-1)的空气流量。这种方法的主要优点是设计简单，制造成本低。该方法不仅适用于微流控器件的流动特性表征，而且为制造新型光纤压力传感器和压力驱动光调制器提供了可能。
In this paper, a novel optical method for monitoring of local pressure in microfluidic devices using a deformable diffraction grating is presented. A test device was fabricated with transparent silicone elastomer-polydimethylsiloxane (PDMS)-using the replica moulding technique. The moulded PDMS chip and a flat glass plate have a bonding interface, which defines a 2 mm x 2 mm diffraction grating and a 200 mum wide, 20 mum deep microchannel. The grating consists of 5 mum wide, 2 mum deep rectangular grooves arrayed with a period of 10 mum. All the grooves are connected to the microchannel, and deformed by internal pressure. The optical response of the device to pressure ranging from -80 to 100 kPa is presented and compared with the theoretical prediction. It is also demonstrated that the test device can be used for measurement of air flow rates ranging from 0 to 0.3 ml min(-1). The major advantages of this method are simple design and inexpensive fabrication. This method is not only desirable for flow characterization of microfluidic devices, but also opens up the possibility of producing new types of fibre-optic pressure sensor and pressure-driven optical modulator.