Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining
Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining
复制标题
飞秒激光微加工在氟化钙中制造三维微盘谐振器
DOI：
10.1007/s00339-014-8388-1
复制
发表时间：
2014-09-01
影响因子：
2.7
通讯作者：
Cheng, Ya
中科院分区：
文献类型：
--
作者：
Lin, Jintian;Xu, Yingxin;Cheng, Ya
我们报道了利用水辅助飞秒激光微加工技术在芯片上制作氟化钙（CaF 2）微盘谐振器。聚焦离子束（FIB）铣削用于产生超光滑侧壁。在1, 550 nm附近测得微谐振器的Q值为4.2 × 104。由于飞秒激光微加工工艺的原因，盘的粗糙度仍然很高，因此Q因子主要受到盘底面散射的限制。这种技术有助于在各种体晶材料上形成片上微谐振器，这可以有利于广泛的应用，如非线性光学，量子光学和光子器件的芯片级集成。
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q) factors of the fabricated microresonators are measured to be 4.2 × 104at wavelengths near 1,550 nm. TheQfactor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.