Formation of molecular templates for fabricating on-chip biosensing devices
Formation of molecular templates for fabricating on-chip biosensing devices
复制标题
用于制造片上生物传感器件的分子模板的形成
DOI：
10.1021/jp036099o
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发表时间：
2004
影响因子：
3.3
通讯作者：
T. Osaka
中科院分区：
文献类型：
--
作者：
Daisuke Niwa;Yukiko Yamada;T. Homma;T. Osaka
研究了在氧化硅表面形成具有不同功能基团的有机硅烷单层膜以制备芯片上生物传感器件。通过化学气相沉积法制备了烷基和全氟烷基功能化单分子膜，并通过液相反应形成了氨基功能化单分子膜。证实每个单层细胞紧密堆积，由单个分子组成。使用这些有机单层进行分子图案化过程。通过紫外光图案化和氧等离子体灰化工艺在衬底上均匀地形成单层图案。通过使用单层/氧化硅/硅结构的电容器曲线来检查液体/修饰电极界面处的pH响应性。氨基改性的表面显示出良好的pH敏感性，为−44 mV/pH，该值与氮化硅表面的pH敏感性相似。另一方面，在任何pH值的情况下，在烷基和烷基的情况下，电位没有改变。
Formation of organosilane monolayers having various functional groups on silicon oxide surfaces for fabricating on-chip biosensing devices was investigated. Alkyl and perfluoro-alkyl functionalized monolayers were prepared by a chemical vapor deposition, and amino functionalized monolayers were formed by a liquid phase reaction. Each monolayer was confirmed to be closely packed and composed of single moiety species. A molecular patterning process using these organic monolayers was performed. The monolayer patterns were uniformly formed on the substrate by using ultraviolet light patterning and oxygen plasma ashing processes. The pH responsibility at the liquid/modified electrode interface was examined by using capacitor profiles of the structure of monolayer/silicon oxide/silicon. The amino modified surface showed good pH sensitivity of −44 mV/pH. This value was similar to that of the silicon nitride surface. On the other hand, the potential was not changed in any pH solutions in the case of the alkyl and...