Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge
Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge
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高电流脉冲磁控管放电中等离子体不均匀性的光学研究
DOI：
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发表时间：
2011
期刊：
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通讯作者：
A. N. Odivanova
中科院分区：
文献类型：
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作者：
A. Kozyrev;N. Sochugov;K. Oskomov;A. N. Zakharov;A. N. Odivanova
本文介绍了用高速分幅相机对强流脉冲磁控管放电等离子体辉光的实验研究结果。结果表明，放电等离子体在方位角方向上是不均匀的。等离子体束团沿电子霍尔漂移方向以约1cm/μs的线速度旋转，其数目与放电电流成正比。等离子体射流形式的等离子体不均匀性以等离子体射流的形式从阴极区域朝向阳极传播。分析表明，形成的不均匀性是由于需要转移高密度的电子流穿过磁场。
Results are presented for experimental studies of the plasma glow in a high-current pulsed magnetron discharge by using a high-speed optical frame camera. It is found that the discharge plasma is inhomogeneous in the azimuthal direction. The plasma bunches rotate with a linear velocity of ∼1 cm/μs in the direction of electron Hall drift, and their number is proportional to the discharge current. Plasma inhomogeneities in the form of plasma jets propagate in the form of plasma jets from the cathode region toward the anode. It is shown analytically that the formation of inhomogeneities is caused by the necessity to transfer high-density electron current across the magnetic field.