Synthesis of superlow-friction carbon films from highly hydrogenated methane plasmas
Synthesis of superlow-friction carbon films from highly hydrogenated methane plasmas
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DOI：
10.1016/s0257-8972(00)00968-3
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发表时间：
2000-11-01
影响因子：
5.4
通讯作者：
Fenske, GR
中科院分区：
文献类型：
--
作者：
Erdemir, A;Eryilmaz, OL;Fenske, GR
在这项研究中，我们研究了类金刚石薄膜（DLC）的摩擦和磨损性能的甲烷等离子体越来越氢化衍生。采用等离子体增强化学气相沉积法在钢基体上制备了薄膜，并在干燥氮气中进行了摩擦学试验。实验结果表明，等离子体中氢的含量与DLC膜的摩擦磨损性能密切相关。具体而言，在等离子体中生长的膜具有较高的氢碳比具有低得多的摩擦系数和磨损率比膜来自源气体具有较低的氢碳比。最低的摩擦系数（0.003），实现了与来自25%的甲烷，75%的氢的膜，而一个相对较高的系数0.015被发现来自纯甲烷的膜。观察到磨损率具有类似的相关性。来自富氢等离子体的膜具有最小的磨损，而来自纯甲烷的膜遭受最高的磨损。我们使用了表面分析方法的组合来表征DLC膜和磨损表面的结构和化学。(C)2000由Elsevier Science B.V.出版，保留所有权利。
In this study, we investigated the friction and wear performance of diamond-like carbon films (DLC) derived from increasingly hydrogenated methane plasmas. The films were deposited on steel substrates by a plasma-enhanced chemical vapor deposition process at room temperature and the tribological tests were performed in dry nitrogen. Tests results revealed a close correlation between the hydrogen in the source gas plasma and the friction and wear coefficients of the DLC films. Specifically, films grown in plasmas with higher hydrogen-to-carbon ratios had much lower friction coefficients and wear rates than did films derived from source gases with lower hydrogen-to-carbon ratios. The lowest friction coefficient (0.003) was achieved with a film derived from 25% methane, 75% hydrogen, while a relatively high coefficient of 0.015 was found for films derived from pure methane. Similar correlations were observed for wear rates. Films derived from hydrogen-rich plasmas had the least wear, while films derived from pure methane suffered the highest wear. We used a combination of surface analytical methods to characterize the structure and chemistry of the DLC films and worn surfaces. (C) 2000 Published by Elsevier Science B.V. All rights reserved.