Study of Electrode Fabrication in Diamond with a Femto-Second Laser
Study of Electrode Fabrication in Diamond with a Femto-Second Laser
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用飞秒激光在金刚石中制作电极的研究
DOI：
10.1002/pssa.201900236
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Lopez Paz I
中科院分区：
文献类型：
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作者：
Lopez Paz I
金刚石是一种辐射硬材料，这使得它适合在高能物理实验中用作粒子探测器。为了进一步减少辐射损伤的影响，金刚石探测器可以通过嵌入垂直于表面的石墨电极来制造，即所谓的3D探测器。这可以通过飞秒激光处理来完成。本文首次系统地研究了激光脉冲能量、阶段平移速度以及单晶和多晶化学气相沉积（CVD）金刚石样品极化的变化规律。在不确定度范围内，对于相同脉冲能量，电极宽度与速度极化和样品没有相关性。用拉曼光谱法研究了电极的石墨含量：没有观察到对制备参数的明显依赖。
Diamond is a radiation hard material, which makes it suitable for its use in high energy physics experiments as a particle detector. To further reduce the effects of radiation damage, diamond detectors can be fabricated by inscribing graphitic electrodes perpendicular to the surface—the so‐called 3D detectors. This can be done via processing with a femtosecond laser. Herein, a systematic study of the cross section of the graphitic wires inscribed into diamond is shown as a function of laser pulse energy, stage translational speed and, for the first time, polarization for a single crystal and polycrystalline chemical vapour deposition (CVD) diamond samples. No dependence of the electrode width with speed polarization and sample for the same pulse energies within uncertainties are observed. The graphitic content of the electrodes is studied in terms of Raman spectrometry: no clear dependence on the fabrication parameters studied is observed.