Flux concentration and modulation based magnetoresistive sensor with integrated planar compensation coils.
Flux concentration and modulation based magnetoresistive sensor with integrated planar compensation coils.
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DOI：
10.1063/1.4796094
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发表时间：
2013-03
期刊：
影响因子：
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通讯作者：
Wugang Tian;Jiafei Hu;M. Pan;Dixiang Chen;Jianqiang Zhao
中科院分区：
文献类型：
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作者：
Wugang Tian;Jiafei Hu;M. Pan;Dixiang Chen;Jianqiang Zhao
1∕f噪声是磁阻（MR）传感器的主要噪声源之一，它会导致低频下的固有检测极限。为了抑制这种噪声，提出了通量集中和垂直运动调制（VMM）的解决方案。 MR 传感器中的磁滞是另一个问题，它会降低其响应线性度和检测能力。为了减少这种影响，引入了脉冲磁化和集成平面线圈磁补偿场的方法。使用微机电系统技术制造了具有集成平面线圈的基于通量集中和 VMM 的磁阻原型传感器。原型传感器的响应线性度从 0.8% 提高到 0.12%。噪声水平降低到接近热噪声水平，原型传感器的低频检测能力增强了80倍以上。
1∕f noise is one of the main noise sources of magnetoresistive (MR) sensors, which can cause intrinsic detection limit at low frequency. To suppress this noise, the solution of flux concentration and vertical motion modulation (VMM) has been proposed. Magnetic hysteresis in MR sensors is another problem, which degrades their response linearity and detection ability. To reduce this impact, the method of pulse magnetization and magnetic compensation field with integrated planar coils has been introduced. A flux concentration and VMM based magnetoresistive prototype sensor with integrated planar coils was fabricated using microelectromechanical-system technology. The response linearity of the prototype sensors is improved from 0.8% to 0.12%. The noise level is reduced near to the thermal noise level, and the low-frequency detection ability of the prototype sensor is enhanced with a factor of more than 80.