A thin film magnetic field sensor of sub-pT resolution and magnetocardiogram (MCG) measurement at room temperature

A thin film magnetic field sensor of sub-pT resolution and magnetocardiogram (MCG) measurement at room temperature
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DOI:
10.1016/j.jmmm.2008.11.083
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发表时间:
2009-04-01
影响因子:
2.7
通讯作者:
Arai, K. I.
Arai, K. I.
中科院分区:
材料科学3区
文献类型:
--
作者:
Yabukami, S.;Kato, K.;Arai, K. I.

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我们开发了一种非常敏感的高频载波型薄膜传感器,使用传输线的子pT分辨率。传感器元件由Cu导体与曲折的模式(20毫米的长度,0.8毫米的宽度,和18毫米的厚度),接地平面,和非晶CoNbZr膜(4毫米厚)。采用幅度调制技术来提高测量高频场(499 kHz)的磁场分辨率,当我们施加499 kHz的AC磁场时,实现了7.10 x 10(-13)T/Hz(1/2)的分辨率。相位检测技术应用于低频场(约1Hz)的测量。使用双混频器时间差方法检测小的相位变化。观察到130度/Oe的高相变。当施加1Hz的小AC场时,获得1.35 × 10(-1/2)T/Hz(1/2)的磁场分辨率。我们将该传感器应用于心磁图(MCG)测量,采用相位检测技术。我们成功地测量了MCG信号,包括典型的QRS波和T波,并与同时获得的常规心电图(ECG)信号进行了比较。(C)2008年爱思唯尔B。V.保留所有权利。
We developed a very sensitive high-frequency carrier-type thin film sensor with a sub-pT resolution using a transmission line. The sensor element consists of Cuconductor with a meander pattern (20mm in length, 0.8mm in width, and 18 mm in thickness), a ground plane, and amorphous CoNbZr film (4 mm in thickness). The amplitude modulation technique was employed to enhance the magnetic field resolution for measurement of the high-frequency field (499 kHz), a resolution of 7.10 x 10(-13) T/Hz(1/2) being achieved, when we applied an AC magnetic field at 499 kHz. The phase detection technique was applied for measurement of the low frequency field (around 1 Hz). A small phase change was detected using a dual mixer time difference method. A high phase change of 130 degrees/Oe was observed. A magnetic field resolution of 1.35 x 10(-12) T/Hz(1/2) was obtained when a small AC field at 1Hz was applied. We applied the sensor for magnetocardiogram (MCG) measurement using the phase detection technique. We succeeded in measuring the MCG signal including typical QRS and T waves, and compared the MCG with a simultaneously obtained conventional electrocardiogram (ECG) signal. (C) 2008 Elsevier B. V. All rights reserved.