Multiscale element mapping of buried structures by ptychographic x-ray diffraction microscopy using anomalous scattering
Multiscale element mapping of buried structures by ptychographic x-ray diffraction microscopy using anomalous scattering
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DOI：
10.1063/1.3644396
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发表时间：
2011-09
影响因子：
4
通讯作者：
Yukio Takahashi;A. Suzuki;N. Zettsu;Y. Kohmura;K. Yamauchi;T. Ishikawa
中科院分区：
文献类型：
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作者：
Yukio Takahashi;A. Suzuki;N. Zettsu;Y. Kohmura;K. Yamauchi;T. Ishikawa
我们提出了一种利用反常散射的光刻X射线衍射显微镜对埋藏在大或厚物体中的纳米、中微尺度结构进行元素映射的技术。我们在大于5×5μm2的视场内，以优于10 nm的像素分辨率对Au/Ag纳米粒子的电子密度和Au元素进行了定量成像，方法是直接对在Au L3边缘以下的两个x射线能量处获得的层析相干衍射图进行位相。这种方法为我们提供了多尺度的结构和元素信息，用于理解材料和生物系统中将纳米结构与宏观功能性质联系起来的元素/性质关系。
We propose an element mapping technique of nano-meso-microscale structures buried within large and/or thick objects by ptychographic x-ray diffraction microscopy using anomalous scattering. We performed quantitative imagings of both the electron density and Au element of Au/Ag nanoparticles at the pixel resolution of better than 10 nm in a field of view larger than 5 × 5 μm2 by directly phasing ptychographic coherent diffraction patterns acquired at two x-ray energies below the Au L3 edge. This method provides us with multiscale structural and elemental information for understanding the element/property relationship linking nanoscale structures to macroscopic functional properties in material and biological systems.