Early Days of SH-type Surface Acoustic Wave Research
Early Days of SH-type Surface Acoustic Wave Research
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SH型声表面波研究的早期阶段
DOI：
10.1143/jjap.42.2909
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发表时间：
2003
影响因子：
1.5
通讯作者：
M. Yamaguchi
中科院分区：
文献类型：
--
作者：
M. Yamaguchi
本文回顾了1977年以后的10年中，主要在36°旋转Y切X传播LiTaO_3（36 YX-LTO）上进行的SH型（漏）声表面波（LSAW）的研究。我们详细讨论了SH型LSAW是如何与表面掠体波（SSBW），然后新发现的石英，钽酸锂和铌酸锂。重点放在这些波成为在实际设备结构中的信号传输的主要传播模式。通过讨论，从理论和实验上阐明了LSAW和SSBW的各种特性，如激发、传输、表面金属化效应和光栅结构。本文还讨论了SH型LSAW与传统瑞利型LSAW不同的几个重要特征，这些特征在SH型LSAW的实际器件应用中起着关键作用。
In this paper, we review the research on SH-type (leaky) surface acoustic wave (LSAW), mainly carried out on 36° rotated Y-cut X-propagated LiTaO3 (36YX-LTO) during the first ten years after 1977. We discuss in detail how SH-type LSAWs are related to surface skimming bulk waves (SSBWs) which were then newly discovered on quartz, LiTaO3 and LiNbO3. An emphasis is laid on which of these waves becomes the main propagation mode for signal transfer in practical device structures. Through the discussion, various characteristics of LSAWs and SSBWs such as excitation, propagation, effects of surface metallisation and grating structures are clarified both theoretically and experimentally. A couple of significant features are also discussed, which definitely separate SH-type LSAWs from conventional Rayleigh-type SAWs and often play a key role in practical device applications of SH-type LSAWs.