Gas sensing properties of tin oxide thin films fabricated from hydrothermally treated nanoparticles -: Dependence of CO and H2 response on film thickness
Gas sensing properties of tin oxide thin films fabricated from hydrothermally treated nanoparticles -: Dependence of CO and H2 response on film thickness
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DOI：
10.1016/s0925-4005(01)00682-7
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发表时间：
2001-06-15
影响因子：
8.4
通讯作者：
Yamazoe, N
中科院分区：
文献类型：
--
作者：
Sakai, G;Baik, NS;Yamazoe, N
从水热处理的SnO 2溶胶悬浮液中旋涂具有不同厚度的薄膜SnO 2传感器。FE-SEM观察显示，由1.8wt.%含SnO 2的溶胶悬浮液具有良好的均匀性填充纳米SnO 2，即使在600 ℃煅烧后，当其厚度高达约300 nm时，虽然观察到许多裂纹较厚的膜。在干燥的空气中，作为膜厚度（80-300 nm）的函数的H-2和CO的气敏特性进行了评价。薄膜的电阻随膜厚的增加而单调下降。结果发现，传感器响应H2同样随着膜厚度的增加而降低，而CO响应被发现是几乎独立的膜厚度。根据氧化膜内气体的扩散性和反应性，讨论了膜厚与气敏性能的关系。(C)2001 Elsevier Science B. V.保留所有权利。
Thin film SnO2 sensors with various thicknesses were spin-coated from a hydrothermally treated SnO2 sol suspension. The FE-SEM observation revealed that the films prepared from the 1.8 wt.% SnO2 containing sol suspension had good uniformity packed with nanocrystalline SnO2 even after calcination at 600 degreesC when its thickness was up to about 300 nm, though many cracks were observed for thicker films. The gas sensing characteristics to H-2 and CO were evaluated as a function of film thickness (80-300 nm) in dry air. The electrical resistance of thin films decreased monotonically with increasing film thickness. It was found that the sensor response to H2 similarly decreased with an increase in film thickness, while the CO response was found to be almost independent of the film thickness. The relationship between gas sensing properties and film thickness was discussed on the basis of diffusivity and reactivity of the gases inside the oxide films. (C) 2001 Elsevier Science B.V. All rights reserved.