High-stability white-light interferometry with reference signal for real-time correction of scanning errors
High-stability white-light interferometry with reference signal for real-time correction of scanning errors
复制标题
带参考信号的高稳定性白光干涉仪，用于实时校正扫描误差
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
J. Schmit
中科院分区：
文献类型：
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作者：
Artur G. Olszak;J. Schmit
白光干涉测量（WLI）的目标地形测量依赖于一个精确的变化率的光程差（OPD）之间的目标和参考光束。然而，扫描仪实现OPD变化的运动并不完善，扫描误差直接影响测量精度。我们描述了一种白光干涉仪，它能够通过监测扫描仪的运动来计算这些误差并实时纠正它们。这种监测是通过在系统中嵌入一个额外的高相干干涉仪来实现的。除了允许监控扫描过程，该系统还提供了自动校准WLI的手段。实验证明了该方法在精度和可重复性方面的显著改进。并对数据分析进行了讨论。
White-light interferometry (WLI) for object topography measurements relies on an accurate rate of change of the optical path difference (OPD) between the object and reference beams. However, the motion of the scanner realizing the OPD change is not perfect, and scanning errors directly impact measurement accuracy. We describe a white-light interferometer that is capable of accounting for these errors and correcting them in real time through the monitoring of the scanner motion. This monitoring is achieved by embedding an additional high-coherence interferometer into the system. Besides allowing for monitoring the scanning progress, this system also provides the means to automatically calibrate the WLI. Significant improvements both in the accuracy and repeatability are demonstrated experimentally. Data analysis is discussed as well.