Suppression mechanism of double positioning growth in 3C-SiC(111) crystal by using an off-axis Si(110) substrate
Suppression mechanism of double positioning growth in 3C-SiC(111) crystal by using an off-axis Si(110) substrate
复制标题
离轴Si(110)衬底对3C-SiC(111)晶体双定位生长的抑制机制
DOI:
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发表时间:
2005
期刊:
影响因子:
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通讯作者:
S.Nishino
中科院分区:
文献类型:
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作者:
M.Nakamura;T.Isshiki;T.Nishiguchi;K.Nishio;S.Ohshima;S.Nishino